The feasibility is verified by the measurement of a sample block. The effect of the resolution of the optical power detector is analyzed. The arithmetic average deviation value of the profile of a gage block of 0.012 μ m is ob-tained. 对一标准量块进行了测量,并对光功率计分辨率对测量结果的影响进行了分析,结果表明本系统在实验室现有条件下可以测量轮廓算术平均偏差Ra为0.012μm的粗糙度量块。